半導体ウエハ、ガラス基板搬送用クリーンロボット SEMISTARシリーズSEMISTAR-GEKKOMD124D
SEMISTARシリーズSEMISTAR-GEKKOMD124D
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(株)安川電機
半導体の”これから”にフィットするウエハ搬送ロボット
第63回（2020年）日刊工業新聞社十大新製品賞本省
- 仕様用途
- 搬送
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製品説明
ダイレクトドライブモータの採用により、ウエハへのストレスは最小限に高速・高精度な搬送を実現
バッテリーレスを実現
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検索条件に一致する情報はありませんでした。
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こんなお問い合わせ
お待ちしております。
- 目的に応じた製品サービスの相談をしたい。
- 製品のデモ・サンプルの紹介を受けたい。